Inficon SQM-160 multi-film rate/thickness monitor

class pymeasure.instruments.inficon.sqm160.SQM160(adapter, name='Inficon SQM-160 thickness monitor', baud_rate=19200, **kwargs)

Bases: Instrument

Inficon SQM-160 multi-film rate/thickness monitor.

Uses a quartz crystal sensor to measure rate and thickness in a thin film deposition process. Connection to the device is commonly made through a serial connection (RS232) or optionally via USB or Ethernet.

A command packet always consists of the following:

1 Byte: Sync character (‘!’ appears only at the start of a message).
1 Byte: length character obtained from the message length without CRC.
A value of 34 is added so that no ‘!’ can occur.
Command message with variable length.
2 Byte: Cyclic Redundancy Check (CRC) checksum.

A response packet always consists of:

1 Byte: Sync character (‘!’ appears only at the start of a message).
1 Byte: length character obtained from the message length without CRC.
A value of 35 is added.
1 Byte: Response status character indicating the status of the command.
Response message with variable length.
2 Byte: Cyclic Redundancy Check (CRC) checksum.

Parameters

adapter – pyvisa resource name of the instrument or adapter instance
name (string) – Name of the instrument.
baud_rate (string) – Baud rate used by the serial connection.
kwargs – Any valid key-word argument for Instrument

sensor_1

Channel: SensorChannel

sensor_2

Channel: SensorChannel

sensor_3

Channel: SensorChannel

sensor_4

Channel: SensorChannel

sensor_5

Channel: SensorChannel

sensor_6

Channel: SensorChannel

property all_values: Get the current rate (Angstrom/s), Thickness (Angstrom), and frequency (Hz) for each sensor

property average_rate: Get the current average rate in Angstrom per second

property average_thickness: Get the current average thickness in Angstrom

check_set_errors(): Check the errors after setting a property.

property firmware_version: Get the firmware version.

property number_of_channels: Get the number of installed channels

read()

Reads a response message from the instrument.

This method also checks for a correct checksum.

Returns: the response packet
Return type: string
Raises: ConnectionError – if a checksum error is detected or a wrong response status is detected.

property reset_flag: Get the power-up reset flag. It is True only when read first after a power cycle.

reset_system_parameters(): Reset all film and system parameters.

reset_thickness_rate()

Reset the average thickness and rate.

This also sets all active Sensor Rates and Thicknesses to zero

reset_time(): Reset the time of the monitor to zero.

write(command): Write a command to the device.

class pymeasure.instruments.inficon.sqm160.SensorChannel(parent, id)

Bases: Channel

Sensor channel for individual rate measurements.

property crystal_life: Get the crystal life value in percent

property frequency: Get the current frequency for a sensor in Hz

property rate: Get the current rate for a sensor in Angstrom per second

property thickness: Get the current thickness for a sensor in Angstrom