AJA DCXS-750 or 1500 DC magnetron sputtering power supply

class pymeasure.instruments.aja.DCXS(adapter, name='AJA DCXS sputtering power supply', **kwargs)

Bases: Instrument

AJA DCXS-750 or 1500 DC magnetron sputtering power supply with multiple outputs

Connection to the device is made through an RS232 serial connection. The communication settings are fixed in the device at 38400, one stopbit, no parity. The device’s communication protocol uses single character commands and fixed length replies, both without any terminator.

Parameters:

• adapter – pyvisa resource name of the instrument or adapter instance

• name (string) – The name of the instrument.

• kwargs – Any valid key-word argument for Instrument

property active_gun: Any

Control the active gun number.

ask(command, query_delay=None, **kwargs)

Write a command to the instrument and return the read response.

Parameters:

• command – Command string to be sent to the instrument.

• query_delay – Delay between writing and reading in seconds. (default: None)

• **kwargs – Keyword arguments passed to the read method.

Returns:

String returned by the device without read_termination.

property current: Any

Measure the output current in mA.

property deposition_time_min: Any

Control the minutes part of deposition time. Can be set only when ‘enabled’ is False.

property deposition_time_sec: Any

Control the seconds part of deposition time. Can be set only when ‘enabled’ is False.

property enabled: Any

Control the on/off state of the power supply

property fault_code: Any

Get the error code from the power supply.

property id: Any

Get the power supply type identifier.

property material: Any

Control the material name of the sputter target.

property power: Any

Measure the actual output power in W.

property ramp_time: Any

Control the ramp time in seconds. Can be set only when ‘enabled’ is False.

read(reply_length=-1, **kwargs)

Read up to (excluding) read_termination or the whole read buffer.

property regulation_mode: Any

Control the regulation mode of the power supply.

property remaining_deposition_time_min: Any

Get the minutes part of remaining deposition time.

property remaining_deposition_time_sec: Any

Get the seconds part of remaining deposition time.

property setpoint: Any

Control the setpoint value. Units are determined by regulation mode (power -> W, voltage -> V, current -> mA).

property shutter_delay: Any

Control the shutter delay in seconds. Can be set only when ‘enabled’ is False.

property shutter_state: Any

Get the status of the gun shutters. 0 for closed and 1 for open shutters.

property software_version: Any

Get the software revision of the power supply firmware.

property voltage: Any

Measure the output voltage in V.