FormFactor Velox Wafer Prober

class pymeasure.instruments.formfactor.Velox(adapter, name='FormFactor Velox', timeout=40000, **kwargs)

Bases: SCPIMixin, Instrument

A class representing the FormFactor Velox wafer prober.

Example for a measurement of an entire wafer:

from pymeasure.instruments.formfactor.velox import Velox

prober = Velox("GPIB0::28::INSTR")  # replace the resource to your needs
coordinates = prober.wafermap.step_first_die()  # move to the first die in the wafermap
while not self.wafermap.end_reached:
    prober.chuck.move_contact()  # move to contact height
    # ...
    # code for measurement, processing and storing data
    # ...
    prober.chuck.move_separation()  # move to separation height
    coordinates = prober.wafermap.step_next_die()  # move to the next die in the wafermap

chuck

Channel:: Chuck

wafermap

Channel:: WaferMap

check_errors(): Invoke read().

property options: Get the installed options. Raises NotImplementedError since command *OPT? is not implemented in Velox.

read()

Read the response and check for errors.

Raise:: ConnectionError if an error is detected.

property version: Any: Get the main software version of Velox (str).

class pymeasure.instruments.formfactor.velox.Chuck(parent, id, **kwargs)

Bases: Channel

A class representing the Chuck functions of the wafer prober.

property index: Any: Control the chuck index (x, y) in micrometer (float, float).

move(x, y, pos_ref='home', unit='microns', velocity=100)

Move the chuck by the specified distance.

Parameters:

x (float) – Distance in X direction
y (float) – Distance in Y direction
pos_ref (str) – Position reference, strictly home, zero, center or diehome.
unit (str) – Unit of x and y, strictly micron, mils, jogs, encoder or index.
velocity (float) – Speed in percent, strictly from 0.1 to 100.

move_align(velocity=100)

Move the chuck to the align height.

Parameters:: velocity (float) – Speed in percent, strictly from 0.1 to 100.

move_contact(velocity=100)

Move the chuck to the contact height.

Parameters:: velocity (float) – Speed in percent, strictly from 0.1 to 100.

move_index(x_steps, y_steps, pos_ref='home', velocity=100)

Move the chuck in index steps.

Parameters:

x_steps (int) – Index steps in X direction
y_steps (int) – Index steps in Y direction
pos_ref (str) – Position reference, strictly home, zero, center or diehome.
velocity (float) – Speed in percent, strictly from 0.1 to 100.

move_separation(velocity=100)

Move the chuck to the separation height.

Parameters:: velocity (float) – Speed in percent, strictly from 0.1 to 100.

class pymeasure.instruments.formfactor.velox.WaferMap(parent, id, **kwargs)

Bases: Channel

A class representing the functions of the Wafermap module.

property enabled: Any: Get whether the WaferMap module is loaded or not (bool).

end_reached = False: Get whether the end of the wafermap is reached or not (bool).

step_first_die()

Move the chuck to the first die and clear the the binning results.

Returns:

List of the int containing the coordinates of the first die.

item[0]: X coordinate
item[1]: Y coordinate
item[2]: Current subdie index
item[3]: Total number of subdies in the die

step_next_die()

Move the chuck to the next logical die.

Returns:

List of the int containing the coordinates of the new die.

item[0]: X coordinate
item[1]: Y coordinate
item[2]: Current subdie index
item[3]: Total number of subdies in the die

step_to_die(x_pos, y_pos, s_pos=None)

Move the chuck to the specified die coordinates.

Parameters:

x_pos (int) – X coordinate.
y_pos (int) – Y coordinate.
s_pos (int) – subdie index.