AJA DCXS-750 or 1500 DC magnetron sputtering power supply
- class pymeasure.instruments.aja.DCXS(adapter, name='AJA DCXS sputtering power supply', **kwargs)
Bases:
Instrument
AJA DCXS-750 or 1500 DC magnetron sputtering power supply with multiple outputs
Connection to the device is made through an RS232 serial connection. The communication settings are fixed in the device at 38400, one stopbit, no parity. The communication protocol of the device uses single character commands and fixed length replys, both without any terminator.
- Parameters
adapter – pyvisa resource name of the instrument or adapter instance
name (string) – The name of the instrument.
kwargs – Any valid key-word argument for Instrument
- property active_gun
Control the active gun number.
- ask(command, query_delay=0, **kwargs)
Write a command to the instrument and return the read response.
- Parameters
command – Command string to be sent to the instrument.
query_delay – Delay between writing and reading in seconds.
**kwargs – Keyword arguments passed to the read method.
- Returns
String returned by the device without read_termination.
- property current
Measure the output current in mA.
- property deposition_time_min
Control the minutes part of deposition time. Can be set only when ‘enabled’ is False.
- property deposition_time_sec
Control the seconds part of deposition time. Can be set only when ‘enabled’ is False.
- property enabled
Control the on/off state of the power supply
- property fault_code
Get the error code from the power supply.
- property id
Get the power supply type identifier.
- property material
Control the material name of the sputter target.
- property power
Measure the actual output power in W.
- property ramp_time
Control the ramp time in seconds. Can be set only when ‘enabled’ is False.
- read(reply_length=-1, **kwargs)
Read up to (excluding) read_termination or the whole read buffer.
- property regulation_mode
Control the regulation mode of the power supply.
- property remaining_deposition_time_min
Get the minutes part of remaining deposition time.
- property remaining_deposition_time_sec
Get the seconds part of remaining deposition time.
- property setpoint
Control the setpoint value. Units are determined by regulation mode (power -> W, voltage -> V, current -> mA).
- property shutter_delay
Control the shutter delay in seconds. Can be set only when ‘enabled’ is False.
- property shutter_state
Get the status of the gun shutters. 0 for closed and 1 for open shutters.
- property software_version
Get the software revision of the power supply firmware.
- property voltage
Measure the output voltage in V.